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| HOME > PRODUCTS > SEMICONDUCTOR TRANSFER ROBOT > ATM ROBOT |
KORO provides solutions for wafer transfer robots from 5 inch to 12 inch.
Koro transfer robots are ideal for ETCHER, CVD, CMP, DIFFUSION and INSPECTION processes. Our robots can accommodate various wafer thickness with OEM designed end-effectors.
KORO provides various end-effectors, such as fork type, tong-type, edge grip type, pocket type and belloni type for different chamber and stage design processes.
KORO provides three standard robots from 5 to 12 inch and also supports OEM development. |
| KR-A8110 |
KR-A8100-91 |
KR-A9200 |
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