PRECISE, RELIABLE TRANSFER ROBOT SYSTEM WITH KOREA ROBOT
HOME > PRODUCTS > SOLAR TRANSFER ROBOT
KORO provides solutions for SOLAR wafer (152mm* 152mm) transfer.
It can be adapted to all signle process such as single wafer inspection equipment.
KORO provides various end-effector such as fork type, tong-type, edge grip type, pocket type and belloni type for different chamber and stage design and process. We designed end-effector to solve the issue such as warping.
KORO provides 1 standard type robots for 2 to 8 inch and support OEM development.
